Electronics Manufacturing -&EPA Final Rule: Subpart I, Mandatory Reporting of Greenhouse Gases United Stales Envirerimerital Protection Agency What Must Be Monitoredfor Manufacturer of Electronics Devices? Measure or estimate these parameters annually ~ Annual manufacturing capacity of the facility. ~ Annual production in terms of substrate surface area. ~ Recipe-specific utilization and by-product formation rates or facility-specific N2O utilization factors, if used. ~ Annual consumption of each fluorinated GHG and N20. ~ Amount of each fluorinated GHG consumed in recipes, process sub-types, and process types; and the amount of N20 consumed in CVD and other N20-using processes. ~ Inventory of each fluorinated GHG and N2O stored in containers at the beginning of the reporting year. ~ Inventory of each fluorinated GHG and N2O stored in containers at the end of the reporting year. ~ Acquisitions of each fluorinated GHG and N2O through purchase records or other transactions. ~ Disbursements of each fluorinated GHG and N2O. ~ Number of containers of gas returned by the facility to gas distributors. ~ Full capacities of gas containers used. ~ Disbursements under exceptional circumstances of gases through sales or other transactions. ~ Facility-wide heel factors for each gas and container type used. ~ Recipe-specific, process sub-type-specific, and process type-specific fluorinated GHG apportioning factors; and CVD-specific and other N20-using process-specific N2O apportioning factors. ~ The density of each fluorinated heat transfer fluid used at the facility. ~ Inventory of each fluorinated heat transfer fluid in containers, other than equipment, at the beginning of the reporting year. ~ Inventory of each fluorinated heat transfer fluid in containers, other than equipment, at the end of the reporting year. ~ Acquisitions of each fluorinated heat transfer fluid, including the amounts purchased from chemical suppliers, equipment suppliers with or inside equipment, and returned to the facility after off-site recycling. ~ Total nameplate capacity of equipment that uses a fluorinated heat transfer fluid and is newly installed during the reporting year. ~ Total nameplate capacity of equipment that uses a fluorinated heat transfer fluid and is removed from service during the reporting year. ~ Disbursements of each fluorinated heat transfer fluid, including amounts returned to chemical suppliers, sold with or inside of equipment, and sent off-site for verifiable recycling or destruction. Electronics Manufacturing Monitoring Checklist Mandatory Reporting of Greenhouse Gases 1 November 2010 ------- If controlled emissions from the use of abatement systems are reported: ~ Fraction of each fluorinated GHG used in recipes, process sub-types, or process types with abatements systems; and the fraction of N2O used in CVD or other N20-using processes. ~ Fraction of each fluorinated GHG destroyed or removed in abatement systems for recipes, process sub-types, or process types; and the fraction of N2O destroyed or removed in abatement systems for CVD or other N20-using processes. ~ Amount of each fluorinated GHG consumed for recipe, process sub-type, and process type fed into each abatement device used at the facility; the amount of N20 consumed for CVD and other N20-using processes fed into each abatement system used at the facility. ~ Properly measured and class average DREs, when the EPA default DRE factor is not used. ~ Uptime of each abatement system used at the facility. ~ The total time each abatement system is in operational mode and fluorinated GHGs or N2O are flowing through the connected process tools. ~ The total time fluorinated GHGs or N2O are flowing through process tools connected to each abatement system. For more information, see the information sheet for Electronics Manufacturing at: http: //epa. gov/climatechange/emissions/ghg infosheets .html. Electronics Manufacturing Monitoring Checklist Mandatory Reporting of Greenhouse Gases 2 November 2010 ------- |