Electronics Manufacturing

-&EPA

Final Rule: Subpart I, Mandatory Reporting of Greenhouse Gases

United Stales
Envirerimerital Protection
Agency

What Must Be Monitoredfor Manufacturer of Electronics Devices?

Measure or estimate these parameters annually

~	Annual manufacturing capacity of the
facility.

~	Annual production in terms of substrate
surface area.

~	Recipe-specific utilization and by-product
formation rates or facility-specific N2O
utilization factors, if used.

~	Annual consumption of each fluorinated
GHG and N20.

~	Amount of each fluorinated GHG
consumed in recipes, process sub-types, and
process types; and the amount of N20
consumed in CVD and other N20-using
processes.

~	Inventory of each fluorinated GHG and
N2O stored in containers at the beginning of
the reporting year.

~	Inventory of each fluorinated GHG and
N2O stored in containers at the end of the
reporting year.

~	Acquisitions of each fluorinated GHG and
N2O through purchase records or other
transactions.

~	Disbursements of each fluorinated GHG
and N2O.

~	Number of containers of gas returned by the
facility to gas distributors.

~	Full capacities of gas containers used.

~	Disbursements under exceptional
circumstances of gases through sales or
other transactions.

~	Facility-wide heel factors for each gas and
container type used.

~	Recipe-specific, process sub-type-specific, and
process type-specific fluorinated GHG
apportioning factors; and CVD-specific and
other N20-using process-specific N2O
apportioning factors.

~	The density of each fluorinated heat transfer
fluid used at the facility.

~	Inventory of each fluorinated heat transfer fluid
in containers, other than equipment, at the
beginning of the reporting year.

~	Inventory of each fluorinated heat transfer fluid
in containers, other than equipment, at the end
of the reporting year.

~	Acquisitions of each fluorinated heat transfer
fluid, including the amounts purchased from
chemical suppliers, equipment suppliers with or
inside equipment, and returned to the facility
after off-site recycling.

~	Total nameplate capacity of equipment that
uses a fluorinated heat transfer fluid and is
newly installed during the reporting year.

~	Total nameplate capacity of equipment that
uses a fluorinated heat transfer fluid and is
removed from service during the reporting year.

~	Disbursements of each fluorinated heat transfer
fluid, including amounts returned to chemical
suppliers, sold with or inside of equipment, and
sent off-site for verifiable recycling or
destruction.

Electronics Manufacturing Monitoring Checklist
Mandatory Reporting of Greenhouse Gases

1

November 2010

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If controlled emissions from the use of abatement systems are reported:

~	Fraction of each fluorinated GHG used in
recipes, process sub-types, or process types
with abatements systems; and the fraction
of N2O used in CVD or other N20-using
processes.

~	Fraction of each fluorinated GHG destroyed
or removed in abatement systems for
recipes, process sub-types, or process types;
and the fraction of N2O destroyed or
removed in abatement systems for CVD or
other N20-using processes.

~	Amount of each fluorinated GHG
consumed for recipe, process sub-type, and
process type fed into each abatement device
used at the facility; the amount of N20
consumed for CVD and other N20-using
processes fed into each abatement system
used at the facility.

~	Properly measured and class average
DREs, when the EPA default DRE factor is
not used.

~	Uptime of each abatement system used at
the facility.

~	The total time each abatement system is in
operational mode and fluorinated GHGs or
N2O are flowing through the connected
process tools.

~	The total time fluorinated GHGs or N2O
are flowing through process tools
connected to each abatement system.

For more information, see the information sheet for Electronics Manufacturing at:
http: //epa. gov/climatechange/emissions/ghg infosheets .html.

Electronics Manufacturing Monitoring Checklist
Mandatory Reporting of Greenhouse Gases

2

November 2010

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